The H-811.I2 miniature hexapod from Physik Instrumente (PI) has a small footprint and a high reliability in applications with high numbers of cycles, such as in optical manufacturing, automation, silicon photonics, and micro-­assembly. With six degrees of freedom (6DoF), this positioning system offers a balance between size, payload, and performance. The compact hexapod can be integrated into demanding applications and complex systems. 

Six synchronously controlled actuators enable the hexapod H-811.I2 from Physik Instrumente to position and align loads with precision in all degrees of freedom – three translational and three rotational. Applications such as the positioning of tools or workpieces in micro-assembly, the alignment of optical fibers in silicon photonics, or the simulation of movements for functional tests benefit from ultracompact hexapods. This means the H-811.I2 can boost the productivity of complex production processes and measuring procedures. The freely definable center of rotation provides a high flexibility in various fields of application. 

The miniature hexapod reaches velocities of up to 20 mm/s and high precision values: minimum incremental motion down to 0.08 µm and a repeatability of ±0.06 µm. The maximum travel range is ±17 mm or ±21°, respectively. Furthermore, the system enables reliable positioning over long operating times and is designed for a payload of 5 kg. The compact system is designed for a lifetime of up to 20 million motion cycles, while providing the highest performance in the smallest possible space. For special application environments, vacuum-compatible versions up to 10-6 hPa are available.

Control of the Parallel-Kinematic System 

The hexapod controller enables simple integration and intuitive control of the parallel-kinematic system: All target positions can be commanded in Cartesian coordinates. The position and alignment of both the reference coordinate system and the center of rotation can be defined in the software and adjusted to the application. To simplify implementation, a simulation program can be used which enables the calculation and depiction of the workspace.