05.04.2022 • Newscoatings

Precisely coat complex-shaped optics

The new Spatial ALD system can uniformly coat complex-shaped optics, allow higher deposition rates than previously possible. It is of interest, among others, for applications in the automotive lighting or VR/AR sectors.

Atomic layer deposition (ALD) technology can produce very thin, high-quality coatings. So far, the ALD process has been used primarily to produce thin functional layers in the semiconductor industry, for example. The new Spatial ALD system of the LZH, which was developed in cooperation with the company Beneq, now makes another application that is in high demand in industry economically viable. The scientists in the optics integration group at the LZH can use it to produce layer systems of uniform thickness much faster than before, for example on strongly curved and structured optics. Previously used methods, such as electron beam evaporation or ion beam sputtering, are severely limited in this respect.

The plasma-based Spatial ALD system (Source: LZH)
The plasma-based Spatial ALD system (Source: LZH)

The Spatial ALD system achieves high deposition rates in the production of ultrathin coating systems for optics and enables the uniform coating of complexly shaped surfaces. This is of interest, for example, in the fields of automotive lighting or augmented reality (AR) / virtual reality (VR), where three-dimensionally shaped lighting elements are essential. As the system is plasma-based, it can operate with low temperatures below a hundred degrees – making it particularly suitable for coating temperature-sensitive polymer optics, which are often used for displays.

The system was developed by the Finnish company Beneq, a leader in ALD technology, in collaboration with the LZH. The ALD process is based on self-limiting chemical reactions between gaseous precursors and substrate surfaces. In systems commonly used at present, the process reactions are carried out one after the other, which necessitates a time-consuming gas exchange of the entire reaction chamber.

This is different in the Spatial ALD system at the LZH: Here, the process cycles take place spatially separated. The system has four individual process chambers separated by pressure and nitrogen, in each, an ALD reaction step is completed. The substrates then rotate into the next chamber. In this way, the scientists achieve deposition rates that were previously only possible with other coating processes. This makes the process particularly economical and at the same time enables high throughput in optical coating.

The scientists presented their first research results with the new system in a conference contribution at this year’s Photonics West. They are also currently working in the Eurostars collaborative project Integra to coat optical diffraction gratings using the Spatial ALD system.

In addition, the LZH is open to new challenges with the Spatial ALD system in the context of further industry and research collaborations.

Company

Beneq Oy

Olarinluoma 9
02200 Espoo
Finland

Company contact







Digital Events

Digital Event Calendar 2025
live or on demand

Digital Event Calendar 2025

By participating in our free digital events, you can stay up to date in your field of expertise.

SPS Atlanta

A New Era of Smart Manufacturing Begins

A New Era of Smart Manufacturing Begins

The inaugural SPS – Smart Production Solutions Atlanta starts soon, marking a significant milestone in the evolution of the SPS brand

most read

Photo
07.07.2025 • News

Quantum technologies on the rise

World of Quantum 2025 in Munich recorded impressive growth with 160 exhibitors from 16 countries and over 22,000 visitors from 41 countries.